Microelectronic Circuits

  1. IC Fabrication and Physical Design
    1. Semiconductor Manufacturing Process
      1. Wafer Preparation
        1. Crystal Growth
          1. Wafer Slicing
            1. Surface Preparation
            2. Photolithography Process
              1. Photoresist Application
                1. Mask Alignment
                  1. Exposure and Development
                    1. Pattern Transfer
                    2. Etching Processes
                      1. Wet Chemical Etching
                        1. Dry Plasma Etching
                          1. Etch Selectivity
                            1. Anisotropic Etching
                            2. Doping Techniques
                              1. Ion Implantation
                                1. Thermal Diffusion
                                  1. Dopant Activation
                                    1. Junction Formation
                                    2. Thin Film Deposition
                                      1. Thermal Oxidation
                                        1. Chemical Vapor Deposition
                                          1. Physical Vapor Deposition
                                            1. Epitaxial Growth
                                            2. Metallization and Interconnect
                                              1. Metal Deposition
                                                1. Via Formation
                                                  1. Multi-Level Metallization
                                                    1. Planarization
                                                  2. CMOS Process Technology
                                                    1. Basic CMOS Process Flow
                                                      1. Well Formation
                                                        1. Gate Oxidation
                                                          1. Polysilicon Gate
                                                            1. Source/Drain Formation
                                                            2. Process Variations
                                                              1. N-Well Process
                                                                1. P-Well Process
                                                                  1. Twin-Well Process
                                                                  2. Advanced Process Features
                                                                    1. Shallow Trench Isolation
                                                                      1. Silicide Formation
                                                                        1. Strain Engineering
                                                                      2. IC Layout Design
                                                                        1. Layout Design Rules
                                                                          1. Minimum Feature Sizes
                                                                            1. Spacing Requirements
                                                                              1. Overlap Rules
                                                                                1. Via Rules
                                                                                2. Layout Techniques
                                                                                  1. Device Matching
                                                                                    1. Parasitic Minimization
                                                                                      1. Electromigration Prevention
                                                                                      2. Physical Verification
                                                                                        1. Design Rule Checking
                                                                                          1. Layout vs Schematic
                                                                                            1. Parasitic Extraction
                                                                                            2. Design Methodologies
                                                                                              1. Full-Custom Design
                                                                                                1. Standard Cell Design
                                                                                                  1. Gate Array Design
                                                                                                    1. Field-Programmable Gate Arrays

                                                                                                Previous

                                                                                                8. Digital Integrated Circuits

                                                                                                Go to top

                                                                                                Back to Start

                                                                                                1. Introduction to Microelectronics